Nanoscale Strains in Si CMOS

µ Strained-Si CMOS characterization technology

µ Experimental procedure

   Ø Site-specific sample preparation by FIB and thickness effect on CBED

   Ø Choice of Zone Axis

   Ø CBED pattern simulation and strain calculation

µ Analysis of Strain-engineered Si CMOS

   Ø Si PMOS with SiGe in S/D

   Ø One-dimensional strain map

   Ø Si NMOS with SiN capping

   Ø STI w/wo Trench Filling

   Ø Process-induced strain

   Ø Strain relaxation in Si1-xGex/Si

 

 

Effective Electron Beam Energy

 

Strain Effect on HOLZ Lines: <230> Z.A.

 

Strain Effect on HOLZ Lines: <340> Z.A.

 

Strain Effect on HOLZ Lines: <340> Z.A.

 

Detection Limit of Pattern Matching

 

Strain Components Calculation